Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical source and detector are needed. When the microcantilever is deflected, the stress is transferred into a change of resistivity of piezoresistors. The integration of piezoresistive read-out provides a promising solution in realizing a compact non-contact AFM. Resolution of piezoresistive read-out is limited by three main noise sources: Johnson, 1/f and thermomechanical noise. In the dynamic shear force mode measurement the method used for cantilever actuation will also affect the recorded noise in the piezoresistive detection circuit. This is the result of a crosstalk between an aluminium path (current loop used for actuation) and piezoresistors located near the base of the beam. In this paper authors described an elaborated in ITE (Institute of Electron Technology) technology of fabrication cantilevers with piezoresistive detection of deflection and compared efficiency of two methods used for cantilever actuation.