Fabrication and Evaluation of Thin-Film Spiral-Antenna-Coupled VOx Microbolometer by Metal–Organic Decomposition

A VO x microbolometer coupled with thin-film spiral antenna was fabricated on a fused-quartz substrate by metal–organic decomposition (MOD). The size of the bolometer was 1 ×52 µm 2 , and the antenna was designed for operating at 75–110 GHz. The DC sensitivity and responsivity of the bolometer were 540 W -1 and 124 V/W at the bias current of 0.5 mA under the irradiation of a 94 GHz electromagnetic wave, respectively. These values were over one order higher than those of the Bi microbolometer, which is conventionally utilized as a detector in terahertz and infrared regions. The antenna-coupled VO x microbolometer with a high responsivity was realized by MOD.