Femtosecond laser rapid prototyping and its applications to micro-nanodevices

Use of femtosecond laser for rapid prototyping (RP) dramatically improves the technology, making RP a high-precision three-dimensional processing tool for fabrication of micro, nano-structures and devices. Depending on materials used, typical fabrication mechanisms include two-photon photopolymerization of resins and laser micro-explosion of transparent solids; considering the strategies of optical exposure, we have direct laser writing and multi-beam interference patterning methods. Here we present our fundamental study on direct laser micro-nanowriting based on two-photon polymerization and its application on photonic and mechanical micro-nanodevices.