Experimental study of perpendicular transport in weakly coupled AlxGa1−xN/GaN superlattices

Perpendicular transport characteristics of n-type AlxGa1−xN/GaN superlattices are presented. Planar and mesa-etched superlattice structures are employed to identify the perpendicular resistance. Perpendicular transport measurements in Al0.22Ga0.78N/GaN superlattices display linear current–voltage characteristics with a resistivity that is a factor of 6.6 higher than for bulk material. A theoretical model is developed for perpendicular transport in AlxGa1−xN/GaN superlattices based on sequential tunneling. The model shows that short superlattice periods are required to minimize the perpendicular resistivity.