The different thickness of HER film electrodes prepared by DC magnetron sputtering device,their overpotential attained at room temperature,1mol/L KOH is related with thickness of the film,the overpotential decreases with increasing of the thickness,although the decreasing degree of different material is varying.All these show that the HER reaction is not happened only on the surface of electrode,the M-H is formed inside the film electrode,and it is related with the characteristic of M-H,so thickness of the film affects the overpotential.