New 600V Lateral Superjunction Power MOSFETs Based on Embedded Non-Uniform Column Structure

New lateral power MOSFETs employing two different, non-uniform, column-shaped superjunction (SJ) structures are proposed for use in smart power ICs that require voltage ratings up to 600V. Using three-dimensional device simulations, the basic electrical characteristics of the new SJ MOSFETs have been evaluated, together with the effect of charge imbalance on the device performance. The simulation results show that the proposed devices exhibit excellent robustness against doping fluctuations, improve the specific on-resistance by as much as 47% compared to conventional RESURF LDMOS structures with similar voltage ratings, and can compete with existing other charge compensation devices