Investigation of Plasma Polymerized Maleic Anhydride Film in a Middle Frequency Dielectric Barrier Discharge

Plasma polymerized maleic anhydride (MA) was carried out by using maleic anhydride supersaturated ethanol solution as a precursor in a dielectric barrier discharge (DBD). The film properties were characterized by water contact angle (WCA), Fourier transfer infrared (FTIR), X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) analysis, and a thickness profilometer. The influence of the processing parameters on the film properties such as the power frequency and polymerization zone was investigated. The results show that anhydride group incorporated into the growing films is favorable at the frequency of 80 kHz and working pressure of 50 Pa. The poly (maleic anhydride) film is uniform and compact at an average deposition rate of 8 nm/min.