Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

Abstract The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented two different structures of MEMS infrared thermopiles based on suspended film structures. They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone, and the thermocouple strip was oriented in the same direction as the temperature gradient. The same MEMS preparation process was used and finally two different structures of the thermopile were characterized separately for testing to verify the impact of our design on the detector. The test results show that the circular and double-ended symmetrical thermopile detectors have responsivities of 27.932 V/W and 23.205 V/W, specific detectivities of 12.1×10 7 cm·Hz 1/2 ·W −1 and 10.1×10 7 cm·Hz 1/2 ·W −1 , and response time of 26.2 ms and 27.06 ms, respectively. In addition, rectangular double-ended symmetric thermopile has a larger field of view than a circular thermopile detector, but is not as mechanically stable as a circular thermopile.