Multi-axial tactile sensor with micro-cantilever embedded in hemispherical elastomer for surface texture measurement

We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters.