Terahertz laser-fabricated all-polymer hole arrays with high-quality quasi-bound states in the continuum

Abstract Dielectric metasurfaces promise to realize ultrahigh-quality ( Q ) resonances due to their ultralow material absorption. Most of them are silicon-based metasurfaces, requiring complex fabricated steps and thus suffering high costs. Laser etching processing has simple steps accompanied by low time consumption and exemplary processing efficiency. Here, an all-polymer metasurface based on hole arrays fabricated by laser processing has been proposed and investigated. Such metasurfaces achieve sharp quasi-bound states in the continuum (quasi-BICs) via breaking structural symmetry, form two annular circulation electric fields in different directions, and thus allow strong coupling between holes. Owing to the low refractive index of polymer, the calculated Q -factor reaches 9555 while the diameter discrepancy is 4 μm. Simulated results proved that the Q -factors of quasi-BICs can be further improved by reducing the film thickness and refractive indices of materials, which can be predicted by the fitting equation. Also, the fields in holes can be enhanced by reducing the film refractive index. These results in simulations and experiments provide an alternative method for designing high- Q resonators in terahertz regions.