Focused ion beam technology: a bibliography

Focused ion beams are used in a wide range of materials characterization and manipulation techniques. This bibliography draws together approximately 1100 references describing the production, control and application of focused ion beams produced using liquid metal ion sources and gas field ion sources. The bibliography has been divided into 13 sections based on source type and application. The applications considered include ion microprobe, secondary ion mass spectroscopy, ion microscopy, lithography, microfabrication, ion beam etching, ion implantation, ion beam deposition, and ion propulsion methods. A simple study of the changing nature of this area of the literature has also been carried out.