Ultra-low dark current back-illuminated AlGaN-based solar-blind ultraviolet photodetectors with broad spectral response

. The peak responsivity at the wavelength of 275 nm reaches 0.19 A/W at -5 V, corresponding to a maximum quantum efficiency of approximately 88%. Based on the absence of any anti-reflection coating, this corresponds to nearly 100% internal quantum efficiency. In addition, the PD shows a quite fast response of 0.62 ms. To the best of our knowledge, this is the record low dark current density and broadest response band reported for the back-illuminated AlGaN-based solar-blind UV detectors.