Progress in Development of Resistive RAM and Its Integration Technology

Resistive random access memory(RRAM) is one of the most promising candidates for next generation of non-volatile memory.The basic structure of RRAM was described.Resistive switching materials and electrodes for RRAM were summarized,and their fabrication technologies were reviewed.Different techniques for integration of RRAM array were discussed and existing problems were analyzed.And finally,the research trend of RRAM was discussed.