Effect of methane flow rate on microstructure and tribological properties of (Cu, Ce)/Ti co-doped DLC films fabricated via reactive magnetron sputtering technology
Effect of methane flow rate on microstructure and tribological properties of (Cu, Ce)/Ti co-doped DLC films fabricated via reactive magnetron sputtering technology, Wu, Yang-Min, Ma, Li-Qiu, Zhou, Sheng-Guo, Zhao, Wen-Jie, Ouyang, Lu
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(2025-6-4)
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