Silicon Thermistor of Positive Temperature Coefficient

Based on the law of temperature dependent mobility of silicon single crtstal, a silicon thermistor of positive temperature coefficient has been designed and manufactured with silicon single crystal. Measurement results show that its resistance increases with the increase of temperature. Temperature coefficient is 0.6%～0.8%·℃~(-1). In the range of -50～+100 ℃, it exhibits quasi-linearity.The thermistor can be used for temperature compensation in various semiconductor devices and sensors.