Behavior of TiO2 Thin Film in a Nanocapacitor

Gold and platinum nanocapacitors have been fabricated using a magnetron sputtering technique. TiO 2 is used as a dielectric material to separate the metal layers which act as the parallel plates for the capacitors. The thickness for metal films and TiO 2 layer is 80 nm and 400 nm, respectively. Capacitance of the nanocapacitors has been measured and dielectric constant of TiO 2 calculated. Both capacitance and dielectric constant are observed to have strong frequency dependence.