Terahertz metrology is becoming more and more important along with the fast development of terahertz technology. This paper reviews the research works of the groups from the physikalisch-technische bundesanstalt (PTB), National institute of standards and technology (NIST), National physical laboratory (NPL), National institute of metrology (NIM) and some other research institutes. The contents mainly focus on the metrology of parameters of power, frequency, spectrum and pulse. At the end of the paper, the prospect of terahertz metrology is predicted.