Effect of the column design and fabrication method on the reverse recovery characteristics of 1.2 kV SiC-superjunction-MOSFETs

We investigated the effects of the column length and fabrication method of the superjunction (SJ) structure on the reverse recovery characteristics of 1.2 kV silicon carbide (SiC) SJ metal–oxide–semiconductor field-effect transistors (MOSFETs). The voltage slope (dV/dt) and reverse recovery current slope (dir/dt) values during the reverse recovery of the SJ-MOSFETs with the SJ structure formed by Aluminum (Al) ion implantation were comparable to the values of MOSFETs without SJ structure at room temperature (RT), but they increased markedly with temperature. This is caused by the reduced p-column carrier concentration at RT during short recovery transient time due to the deep hole trap (DI center) introduced by ion implantation. At 175 °C, a softer reverse recovery waveform was obtained by shortening the SJ columns. Besides, Al ion implanted SJ-MOSFETs exhibited a weaker current dependence of the reverse recovery charge Qrr at 175 °C indicating a lower carrier injection level compared to the SJ-MOSFETs with the SJ structure formed by trench formation and epitaxial growth. This is caused by the short carrier lifetime of the SJ columns due to the Al ion implantation defects. The short and Al ion implanted SJ columns are effective for soft reverse recovery characteristics in SiC-SJ-MOSFETs.