Damping in precision vibration control: A review

This paper reviews various damping techniques used in precision vibration control devices such as optical tables and other vibration-isolated platforms for sensitive optical, acoustical, and life sciences experiments, as well as advanced technological processes [1]. These techniques include tunable dynamic vibration absorbers, active damping, and modal damping in isolated platforms, as well as active and passive damping in vibration isolators. The theoretical background, principles of implementation, and test results are illustrated by case studies that include a large tuned-damped optical bench in a petawatt laser facility, multi-beam lithography enabled by active damping, effective damping of vibration-isolated workstation for experiments on animal hearing, and atomic force microscopy assisted by active vibration isolation. [1] V.M. Ryaboy, Vibration Control for Optomechanical Systems, World Scientific, 2022.