The properties of ZnO thin films depend on dopants.This article describes the progress in doped ZnO thin films,analyzes the influence of different dopants on the p-type doping property,photoluminescence and ferromagnetic property of ZnO thin films,and puts forwards the properties of new photoluminescence can be produced from RE-doped ZnO thin films and the change of the properties of ZnO thin films can be realized by co-doping technology.