Chemical vapor deposition of group IVb, Vb, and VIb elements with nonmetals. A literature review. Information circular

The Bureau of Mines reviewed the chemical vapor deposition (CVD) literature on the nonmetal binary and ternary compounds of the group IVB, VB, and VIB elements, with emphasis directed to the following nonmetals: B, C, N, O, and Si. This review examines each of these binary and selected ternary compounds of the group IVB, VB, and VIB elements as coatings and gives some of their preparative methods, uses, and properties. A total of 259 references were found for these compounds of the nine elements. This review was utilized in the Bureau's research to provide abrasion-, erosion-, and corrosion-resistant coatings in order to conserve critical metals and protect various metallic surfaces in metallurgical, mining, and energy conversion systems.