Shape Evaluation of UV-PDMS Microstructures Made by Using Photolithography

We propose a microfabrication method for UV-PDMS (ultra violet-curable polydimethylsiloxane), which can be fabricated by photolithography due to its material properties. However, the accuracy of the UV-PDMS microstructures fabricated by photolithography is inferior to that of the conventional photoresists. To improve the microfabrication accuracy of UV-PDMS, we investigated the solvent used to remove unexposed areas of photo-patterned UV-PDMS with the aim of selecting an appropriate solvent for microfabrication of UV-PDMS. The effect of the difference in solvent on the microfabrication accuracy of UV-PDMS was quantitatively evaluated.