The Effect of Substrate Temperature on the Structure of Titanium Carbide Deposited by Activated Reactive Evaporation

A change in substrate temperature produces a marked change in the microstructure, preferred orientation, and microhardness of TiC deposits. At low temperatures (∼500 °C) the structure consists of tapered crystallites and changes to a structure consisting of columnar grains at the higher temperatures (∼1000 °C). The high temperature deposits exhibit very high microhardness values (∼4500–5000 kg/mm2 KHN).