High-Performance Mach–Zehnder Modulator Based on Thin-Film Lithium Niobate with Low Voltage-Length Product

Electro-optic modulators (EOMs) based on a thin-film lithium niobate (TFLN) photonic integration platform play a crucial role in loading electrical signals onto optical signals. In this paper, we proposed on-chip EOMs operating at two commercially available wavelengths of 850 and 1550 nm and successfully demonstrated rather low voltage-length products ( V π ·L s) of 0.78 V·cm and 1.29 V·cm, respectively. Additionally, the EOM working at 1550 nm exhibits the capability of 3-dB electro-optic (E-O) bandwidth beyond 40 GHz due to the limitation of our test conditions. This study is quite helpful for understanding EOM structures in a TFLN platform, as well as the fabrication of high-performance and multifunctional EOM devices.