SnO2 thin film deposition using atomic layer deposition technique: Properties and applications

SnO2 film is a very effective material for different applications in sensor technology and energy engineering. There are several processes through which SnO2 are being deposited like CVD, Sputtering, Sol-Gel, Atomic Layer Deposition (ALD), etc. Out of which ALD process is very advanced, reliable, and well-maintained process. In this article, different aspects of ALD grown SnO2 has been discussed in terms of materials perspective, properties, and applications. There are several precursors and substrates used for such processes according to the application of the SnO2 films. Different properties of SnO2 make it favorable for diverse applications like electrodes of capacitors and batteries, gas sensing, sensors, and solar cells.