Abstract Mixed monolayers consisting of 4-fluorobenzenethiolate and 1-octadecanethiolate on Au surfaces were formed by immersing in an ethanol solution of 4-fluorobenzenethiol (FBT), and subsequently by immersing in that of 1-octadecanethiol (ODT). To obtain systematically a mixed monolayer, the formation of FBT- and ODT-monolayers was investigated with respect to the reaction time and concentration of the solution. The monolayer formed on a Au surface was evaluated based on the work function, the water contact angle, and the X-ray photoelectron spectroscopy (XPS) spectra measured. The XPS measurement of substrates prepared for formation of a mixed monolayer exhibited F 1 s and C 1 s spectra supporting the presence of a mixed monolayer consisting of 4-fluorobenezenethiolate and 1-octadecanethiolate.