Hybrid System Combining SIMS and Focused Ion Beam-scanning Electron Microscopy

A hybrid system that combines secondary ion mass spectrometry (SIMS) and a focused ion beam-scanning electron microscope (FIB-SEM) is a powerful tool for surface and sub-surface imaging and analysis. The integration of mass spectrometry with a dual-column microscope, referred to here as FIB-SIMS, facilitates correlative analysis using two powerful analytical techniques. The FIB-SEM is used to image, sputter, or modify the sample surface with nanometre precision and the mass analyser for high-spatial resolution and high-sensitivity chemical/isotopic analyses. FIB-SIMS detects and identifies the secondary ions emitted from the sample surface when it is bombarded by the focused ion beam and measures the mass-to-charge ratios (m/q) over a specified mass range. FIB-SIMS can provide high lateral resolution (<50 nm) and depth resolution (<10 nm) analysis on the elemental and isotopic distribution of the sample, as well as some light molecular fragments information. Notably, it can detect and map the distribution of light elements (such as hydrogen, lithium, boron, etc.) and isotopes that are difficult or impossible to measure by other techniques such as energy-dispersive X-ray spectroscopy (EDS), which offers unique advantages for the chemical analysis of materials.