Synthetic Analysis of Noise in Capacitive Micro-Accelerometer

The noises for capacitive micro-accelerometer are the main obstacle to improving its performance.This paper analyzes the noise characteristics of capacitive micro-accelerometer.The noise sources are modeled as mechanical and electrical parts,and of their values in the system are both analyzed and calculated by the theory of thermodynamics equilibrium and the characteristic of integrate circuit noise.From analyzing the result of experiments by capacitive micro-accelerometer which is designed of our own,the charge amplifier noise is the main noise source.The model of noise and conclusion are validated by experiments.