Lv4
688 积分 2025-09-15 加入
Research on the generation mechanism of CO in low-pressure CO2 dielectric barrier discharge driven by microsecond pulse voltage
2个月前
已完结
Focus ring geometry influence on wafer edge voltage distribution for plasma processes
2个月前
已完结
Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors
2个月前
已完结
Performance of tri-layer process required for 22 nm and beyond
2个月前
已完结
Autonomous hybrid optimization of a SiO2 plasma etching mechanism
2个月前
已完结
Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O2 mixtures: Consequences of ion and electron distributions on etch profiles
2个月前
已完结
Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide
2个月前
已完结
Systematic studies on reactive ion etch-induced deformations of organic underlayers
4个月前
已完结
Performance of tri-layer process required for 22 nm and beyond
4个月前
已完结
Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra
7个月前
已完结
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