Lv31
230 积分 2023-10-27 加入
Rapid and Efficient Oxidation Process of SiC by <i>In Situ</i> Multiple RTP Steps
2小时前
已完结
Oxidation Process by RTP for 4H-SiC MOSFET Gate Fabrication
2小时前
已完结
In situ silicon-wafer temperature measurements during RF argon-ion plasma etching via fluoroptic thermometry
6天前
已完结
Nitrogen incorporation in SiO2 by rapid thermal processing of silicon and SiO2 in N2O
6天前
已完结
Process kit and wafer temperature effects on dielectric etch rate and uniformity of electrostatic chuck
6天前
已完结
On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck
6天前
已完结
Wafer backside cleaning for defect reduction and litho hot spots mitigation: DI: Defect inspection and reduction
1个月前
已完结
High Productivity Single Wafer Radical Oxidation System
1个月前
已完结
Impacts of RTP Pyrometer Offsets on Wafer Overlay Residue
1个月前
已完结
Development of RTP for industrial solar cell processing
1个月前
已完结
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