| 标题 |
Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Micromechanics and Microengineering 作者:M A Gosálvez; B Tang; P Pal; K Sato; Y Kimura; K Ishibashi 出版日期:2009 |
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(2025-6-4)