| 标题 |
Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Vacuum Science & Technology B 作者:Manish Singh; Lakshmi Narayanan Ramasubramanian; Raj N. Singh 出版日期:2023-06-30 |
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(2025-6-4)