| 标题 |
Nonuniform Load Mechanical Modeling for Direct Wafer Bonding Incorporating the Pressure Distribution |
| 网址 | |
| DOI | |
| 其它 |
期刊:IEEE Transactions on Components, Packaging and Manufacturing Technology 作者:Shirong Cai; Yunyun Sun; Shijing Wu 出版日期:2026 |
| 求助人 | |
| 下载 |
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(2025-6-4)