| 标题 |
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process |
| 网址 | |
| DOI | |
| 其它 |
期刊:Polymer Testing 作者:Jung-Hwan Lee; Maneesh Kumar Poddar; Kwang-Min Han; Heon-Yul Ryu; Nagendra Prasad Yerriboina; et al 出版日期:2020 |
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(2025-6-4)