Deposition of TiN and TiAlN Thin Films on Stainless Steel Tubes by a Cylindrical Magnetron Sputtering Method

材料科学 氮化钛 X射线光电子能谱 溅射沉积 涂层 氮化物 冶金 扫描电子显微镜 物理气相沉积 薄膜 溅射 复合材料 化学工程 图层(电子) 纳米技术 工程类
作者
Kunal Trivedi,Ramkrishna Rane,Alphonsa Joseph,Shashi Bhushan Arya
出处
期刊:Materials Performance and Characterization [ASM International]
卷期号:10 (1): 473-488 被引量:3
标识
DOI:10.1520/mpc20200158
摘要

Abstract Titanium nitride (TiN) and titanium aluminum nitride (TiAlN) coatings are very hard materials that are mostly coated on cutting tools to increase the tool life. These coatings have also been successfully applied as a coating material for biomedical applications mainly due to their tribological properties, biocompatibility, and affordable price. In an attempt to develop transition metal nitride coatings on specimens of cylindrical geometry, TiN and TiAlN thin films were deposited successfully on stainless steel tubes using a direct-current cylindrical magnetron cosputtering method. Both types of coatings were uniform in nature and had good adherence to the substrate. TiN and TiAlN thin films were characterized systematically to determine their structure, surface morphology, chemical states, chemical structure, and electrochemical behavior using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and potentiodynamic methods, respectively. The XRD patterns of the TiN and TiAlN coatings indicated (111) preferential orientation. Cross-sectional SEM images revealed a columnar growth of the coatings with an arrow-headed geometry. XPS characterization showed the presence of TiN, Titanium dioxide, titanium oxynitride, aluminum oxide, and aluminum nitride phases. Potentiodynamic polarization tests in 3.5 % sodium chloride solution revealed that the TiAlN coating exhibited superior corrosion resistance compared with the TiN coating. Furthermore, TiAlN coating showed 94 % of average absorption in ultraviolet-visible region using photospectrometry. The cylindrical magnetron sputter deposition technique enables development of uniform protective coatings on tubular geometries, which are frequently employed in solar thermal and nuclear applications.
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