钝化
倒装芯片
材料科学
焊接
聚酰亚胺
铜
压力(语言学)
互连
热铜柱凸点
有限元法
复合材料
炸薯条
模具(集成电路)
布线(电子设计自动化)
结构工程
电子工程
冶金
电气工程
图层(电子)
计算机科学
纳米技术
工程类
哲学
语言学
计算机网络
胶粘剂
作者
Ying-Chih Lee,Chin-Li Kao,Jean-Marc Yannou,Chang-Chi Lee
摘要
One of the major benefits of copper pillar interconnect is to reduce the pillar footprint in comparison to that for traditional solder bumps. This increases the space available for escape routing between neighboring pillars as compared to traditional solder bumps and, in many cases, permits the reduction of the number of substrate layers and, in turn, reduces the cost of the flip chip package solution. In this paper, we have used finite element analysis to simulate thermo-mechanical stresses in oblong-shaped copper pillars, a configuration which further increases the space available for escape routing. We pay particular attention to the maximum tensile stress at the surface of the dielectric layers on the chip and the solder. We compare three different types of copper pillar cross section geometries: circular, oblong-shape in the radial direction and oblong-shape in the anti-radial direction as well as diameters of polyimide passivation opening under the copper pillar. We find the lowest stress is obtained by using oblong shaped copper pillars in the radial direction in conjunction with a small opening of the polyimide passivation.
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