Strategies for selective functionalization of amorphous chalcogenide rib waveguides

We report on two selective functionalization strategies to create a chemical contrast between the active rib waveguides and the passive surrounding areas of a chalcogenide-based optical sensing system. In such configuration, the analyte could be concentrated on the waveguides and interact with the evanescent field, producing a stronger optical signature. The rib waveguides are obtained by photolithography and subsequent ion beam etching of amorphous Ge-Se-Te thin films that allow residual resist to remain above the waveguides. The first functionalization strategy consists in the reuse of the resist as a mask during the following surface modification process. It allows the functionalization of all areas around the waveguides. The second strategy consists of depositing a new sacrificial metal layer, leading to a perfect negative functionalization contrast, modifying only the waveguides. For the two strategies developed, three precursors were used. The use of a silylated fluorescein derivative allowed the validation of the protocols, with the observation of a fluorescence contrast between the functionalized and non-functionalized areas. The use of tetraethoxysilane as a hydrophilic precursor and the mixture of tetraethoxysilane and octyl-trimethoxysilane as a hydrophobic precursor created a clear contrast in wettability between the rib waveguides and the surrounding areas. A spore deposition was performed on functionalized components according to the two proposed strategies, with the two hydrophilic/hydrophobic precursors. The spore immobilization rate was increased by making the waveguides more hydrophobic, as well as by making the areas surrounding the guides more hydrophilic, demonstrating the effectiveness of our two strategies.