Master-slave control with trajectory planning and Bouc-Wen model for tracking control of piezo-driven stage

In this paper, a redundant Piezo-driven stage having 3RRR compliant mechanism is introduced, we propose the master-slave control with trajectory planning (MSCTP) strategy and Bouc-Wen model to improve its micro-motion tracking performance. The advantage of the proposed controller lies in that its implementation only requires a simple control strategy without the complexity of modeling to avoid the master PEA’s tracking error. The dynamic model of slave PEA system with Bouc-Wen hysteresis is established and identified via particle swarm optimization (PSO) approach. The Piezo-driven stage with operating period T=1s and 2s is implemented to track a prescribed circle. The simulation results show that MSCTP with Bouc-Wen model reduces the trajectory tracking errors to the range of the accuracy of our available measurement.