Efficient Fabrication of Bioinspired Flexible Pressure Sensors via Electrohydrodynamic Jet Printing Method

Bioinspired microdevices have made significant strides in various applications including human motion and health detection. However, facile and highly efficient fabrication approach of flexible pressure sensors remains a great challenge. Herein, inspired by the gecko's foot structure, a flexible pressure sensor with microdomes structure is fabricated by tip-assisted on-demand electrohydrodynamic jet (EHD-jet) printing method. Ascribed to the interlocking electrodes with microdome structure, 3D deformation rates are substantially enlarged. When the microdromes structure is under pressure, the resistivity of carbon nanotubes film coated on the surface of microdomes structure will change remarkably. By using the combined effect of assisted tip and ring focusing electrode, the influence and constraints on microstructure fabrication caused by substrate material and morphology are minimized. The desired uniform structures can be adjusted rapidly by changing the printing parameters and liquid properties. High length-height ratio (0.64) of microdomes enhances sensitivity, with minimum detection limit is 2 Pa and response time is 40 ms. Finally, the bionic flexible sensor indicated excellent performance in capable of detecting pressure, sound vibrations and human motion. This work presents a new method for high-efficiency fabrication micro-nano patterns for flexible sensors inspired, which could be used in wearable tech and health monitoring.