Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Abstract Magnetic shape memory alloys exhibit various multifunctional properties, which range from high stroke actuation and magnetocaloric refrigeration to thermomagnetic energy harvesting. Most of these applications benefit from miniaturization and a single crystalline state. Epitaxial film growth is so far only possible on some oxidic substrates, but they are expensive and incompatible with standard microsystem technologies. Here, epitaxial growth of Ni–Mn–based Heusler alloys with single crystal‐like properties on silicon substrates is demonstrated by using a SrTiO 3 buffer. It is shown that this allows using standard microfabrication technologies to prepare partly freestanding patterns. This approach is versatile, as its applicability for the NiTi shape memory alloy is demonstrated and spintronic and thermoelectric Heusler alloys are discussed. This paves the way for integrating additional multifunctional effects into state‐of‐the‐art microelectronic and micromechanical technology, which is based on silicon.