| 标题 |
Performance of polishing for silicon carbide using developed silicone-modified polyurethane polishing pads |
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| DOI | |
| 其它 |
期刊:Materials Science and Engineering: B 作者:Zirong Huang; Huilong Li; Da Hu; Chen Lin; Jiabin Lu 出版日期:2026-10-01 |
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(2025-6-4)