Laser‐Induced Breakdown Spectroscopy Online Quantitative Analysis for Laser Processing

Plasma fluctuations, the uncertainty of laser ablation, and bremsstrahlung limit the identification of online element analysis during laser processing and cause difficulty in achieving concentration results with sufficient accuracy and repeatability. A laser‐induced breakdown spectroscopy (LIBS) online monitoring system with plasma spatial filtering and spectral screening is proposed to solve this problem. In this system, the high‐frequency ablation noise component of the plasma is eliminated using a specially designed optical Fourier filtering structure, and a spectral screening system based on plasma time waveform monitoring is used to suppress the influence of plasma fluctuations. Without noise filters or algorithm optimizations and based only on the basic internal standard method, the calibration curves of all nine elements in the alloy sample exhibits a Pearson's R 2 value ranged from 0.91 to 0.99, with a mean of 0.94. The relative standard deviations are all in the range of 3.5%–8.4% with a mean of 5.4%. The accuracy and repeatability are comparable to those of typical LIBS systems.