光电二极管
硅
材料科学
硼
薄脆饼
光电子学
分析化学(期刊)
兴奋剂
扩散
载流子寿命
基质(水族馆)
响应度
吸气剂
化学
物理
光电探测器
海洋学
有机化学
色谱法
热力学
地质学
作者
M. S. Kukurudziak,Э. В. Майструк
标识
DOI:10.1109/khpiweek57572.2022.9916420
摘要
Boron diffusion was studied in the manufacture of four-element silicon p-i-n photodiodes with a guard ring using planar technology. Substrate gettering by means of boron diffusion in the opposite direction of plates from planar sources has been studied. The dependence of the surface resistance and the depth of the P +- p-junction on the duration of the diffusion process has been established. Optimal diffusion regimes have been determined to obtain the minimum dark currents and maximum responsivity due to the gettering of generation-recombination centers and the restoration of the time of minor charge carriers. The transmission spectra of wafers with different surface resistances and p + -p-junction depths have been studied to ensure the maximum efficiency of reflection of the gold layer from the rear side of the substrate. Surface defect formation during boron diffusion has been studied.
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