In situ vibration-assisted magnetorheological polishing based on frequency band error suppression

Ultra-precision polishing uses magnetorheological technology and smooth technology to suppress low-frequency and medium-to-high-frequency errors alternately, but smooth technology destroys the existing low-frequency accuracy, leading to iterative processing in a dead cycle. Based on the above problems, a vibration-assisted magnetorheological deterministic polishing method is proposed, which has the ability to correct the full-frequency error; the influence of vibration parameters on the full-frequency error correction is investigated; and fused silica optical elements are processed, with the error in the 50-mm-1-mm band <3 nm RMS, in the 1-mm-1-μm band <0.3nm RMS, and in the 1-μm-1-nm band <0.4nm RMS.