| 标题 |
Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide |
| 网址 | |
| DOI | |
| 其它 |
期刊:Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology 作者:Xinxing Ban; Zhuangzhi Tian; Jianhui Zhu; Tianxu Duan; Shaodong Zheng; et al 出版日期:2023-12-08 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人下载。 |
PDF的下载单位、IP信息已删除
(2025-6-4)