Since the suggestions of Gudzenko and Yakovienko,l intensive studies for photo-assisted collisions have been carried out experimentally and theoretically for various collision schemes. Previously, we have reported the formations2 of KrF excimer through photo-assisted collision between Kr and F atoms, and also its applications3 to the kinetics of KrF excimer. In the present paper, we report on a new formation process of KrF excimer induced by 248-nm photon in the laser intensity region higher than the previous works.