| 标题 |
Changes in the structure properties and CMP manufacturability of a poly-Si film induced by deposition and annealing processes |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Materials Processing Technology 作者:Sung‐Min Park; Haedo Jeong; Sang‐Hee Yoon 出版日期:2016-03-18 |
| 求助人 | |
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(2025-6-4)